The text follows a logical progression from physics-based fundamentals to complex system-level design: Device Fundamentals: MOSFET fabrication
Searching Google for “free PDF” leads to sites like PDFDrive (defunct), Library Genesis (LibGen), or Academia.edu uploads. Here is why these rarely yield the “best” version: cmos digital integrated circuits sung mo kang pdf best
Don't skip the history. Kang's explanation of Moore's Law and the CMOS fabrication process (lithography, etching, deposition) is essential. The PDF is especially useful here because you can zoom in on the fabrication cross-section diagrams that are hard to see in physical print. The text follows a logical progression from physics-based